3D-Printed Optics for Wafer-Scale Probing

Mass production of photonic integrated circuits requires high-throughput wafer-level testing. We demonstrate that optical probes equipped with 3D-printed elements allow for efficient coupling of light to etched facets of nanophotonic waveguides. The technique is widely applicable to different integration platforms.Comment: Accepted for presentation at European Conference on Optical Communications (ECOC) 201

Ultra-broadband polarization beam splitter and rotator based on 3D-printed waveguides

Multi-photon lithography has emerged as a powerful tool for photonic integration, allowing to complement planar photonic circuits by 3D-printed freeform structures such as waveguides or micro-optical elements. These structures can be fabricated with high precision on the facets of optical devices and lend themselves to highly efficient package-level chip-chip-connections in photonic assemblies. However, plain light transport and efficient coupling is far from exploiting the full geometrical design freedom that is offered by 3D laser lithography. Here, we extend the functionality of 3D-printed optical structures to manipulation of optical polarization states. We demonstrate compact ultra-broadband polarization beam splitters (PBS) that can be combined with polarization rotators (PR) and mode-field adapters into a monolithic 3D-printed structure, fabricated directly on the facets of optical devices. In a proof-of-concept experiment, we demonstrate measured polarization extinction ratios beyond 11 dB over a bandwidth of 350 nm at near-infrared (NIR) telecommunication wavelengths around 1550 nm. We demonstrate the viability of the device by receiving a 640 Gbit/s dual-polarization data signal using 16-state quadrature amplitude modulation (16QAM), without any measurable optical-signal-to-noise-ratio (OSNR) penalty compared to a commercial PBS.Comment: 11 pages and 4 figures in the main part + 7 pages and 4 figures in the supplementar

Hybrid 2D/3D Photonic Integration for Non-Planar Circuit Topologies

We present a concept for realizing crossing-free photonic integrated circuits (PIC) using 3D freeform waveguides. We prove the viability of the approach using a silicon photonic 4 x 4 switch-andselect device. The method is applicable to a wide range of PIC technologies

3D-Printed Scanning-Probe Microscopes with Integrated Optical Actuation and Read-Out

Scanning‐probe microscopy (SPM) is the method of choice for high‐resolution imaging of surfaces in science and industry. However, SPM systems are still considered as rather complex and costly scientific instruments, realized by delicate combinations of microscopic cantilevers, nanoscopic tips, and macroscopic read‐out units that require high‐precision alignment prior to use. This study introduces a concept of ultra‐compact SPM engines that combine cantilevers, tips, and a wide variety of actuator and read‐out elements into one single monolithic structure. The devices are fabricated by multiphoton laser lithography as it is a particularly flexible and accurate additive nanofabrication technique. The resulting SPM engines are operated by optical actuation and read‐out without manual alignment of individual components. The viability of the concept is demonstrated in a series of experiments that range from atomic‐force microscopy engines offering atomic step height resolution, their operation in fluids, and to 3D printed scanning near‐field optical microscopy. The presented approach is amenable to wafer‐scale mass fabrication of SPM arrays and capable to unlock a wide range of novel applications that are inaccessible by current approaches to build SPMs

Superconducting Nanowire Single-Photon Detector (SNSPD) with 3D-Printed Free-Form Microlenses

We present an approach to increase the effective light-receiving area of superconducting nanowire single-photon detectors (SNSPD) by means of free-form microlenses that are printed in situ on top of the sensitive detector area using high-resolution multi-photon lithography. We demonstrate a detector based on a niobium-nitride (NbN) nanowire with a 4.5 $\mathrm \mu$m $\times$ 4.5 $\mathrm \mu$m sensitive area, supplemented with a lens of 60 $\mathrm \mu$m diameter. For free-space illumination at a wavelength of 1550 nm, the lensed sensor has a 100-fold-increased effective collection area, which leads to strongly enhanced system detection efficiency without the need for long nanowires. Our approach can be readily applied to a wide range of sensor types and effectively overcomes the inherent design conflict between high counting speed due to short sensor reset time, high timing accuracy, and high fabrication yield on the one hand and high collection efficiency through large effective detection areas on the other hand.Comment: 25 pages, 6 figure